US PATENT SUBCLASS 438 / FOR 325
.~.~ From vapor phase (437/165)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 149  DF  INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7}
FOR 301  DF  .~ Diffusing a dopant (437/141) {17}
FOR 325.~.~ From vapor phase (437/165) {3}
FOR 326  DF  .~.~.~> In plural stages (437/166)
FOR 327  DF  .~.~.~> Zn (Zinc) dopant (437/167)
FOR 328  DF  .~.~.~> Solid source is operative relation with semiconductor material (437/168) {1}

DEFINITION

Classification: 438/FOR.325

From vapor phase:

Foreign art collection for processes wherein the impurity is produced by a gaseous substance.