438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 286 | DF | .~.~ Heteroepitaxy (437/126) {7} |
FOR 288 | .~.~.~ Graded composition (437/128) |