438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
|
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 242 | DF | .~.~> Including heat to anneal (437/82) |
FOR 243 | DF | .~.~> Growing single crystal on amorphous substrate (437/83) |
FOR 244 | DF | .~.~> Growing single crystal on single crystal insulator (SOS) (437/84) |
FOR 245 | DF | .~.~> Including purifying stage during growth (437/85) |
FOR 246 | DF | .~.~> Using transitory substrate (437/86) |
FOR 247 | DF | .~.~> Using inert atmosphere (437/87) |
FOR 248 | DF | .~.~> Using catalyst to alter growth process (437/88) |
FOR 249 | DF | .~.~> Growth through opening (437/89) {2} |
FOR 253 | DF | .~.~> Specified crystal orientation other than (100) or (111) planes (437/93) |
FOR 254 | DF | .~.~> Introducing minority carrier life time reducing dopant during growth, i.e., deep level dopant Au (Gold), Cr (Cromium), Fe (Iron), Ni (Nickel), etc. (437/94) |
FOR 255 | DF | .~.~> Autodoping control (437/95) {1} |
FOR 257 | DF | .~.~> Forming buried regions with outdiffusion control (437/97) {1} |
FOR 259 | DF | .~.~> Growing mono and polycrystalline regions simultaneously (437/99) |
FOR 260 | DF | .~.~> Growing silicon carbide (SiC) (437/100) |
FOR 261 | DF | .~.~> Growing amorphous semiconductor material (437/101) |
FOR 262 | DF | .~.~> Source and substrate in close-space relationship (437/102) {2} |
FOR 265 | DF | .~.~> Vacuum growing using molecular beam, i.e., vacuum deposition (437/105) {2} |
FOR 268 | DF | .~.~> Growing single layer in multi-steps (437/108) {4} |
FOR 273 | DF | .~.~> Using electric current, e.g., Peltier effect, glow discharge, etc. (437/ 113) |
FOR 274 | DF | .~.~> Using seed in liquid phase (437/114) {1} |
FOR 277 | DF | .~.~> Liquid and vapor phase epitaxy in sequence (437/117) |
FOR 278 | DF | .~.~> Involving capillary action (437/118) |
FOR 279 | DF | .~.~> Sliding liquid phase epitaxy (437/119) {5} |
FOR 285 | DF | .~.~> Tipping liquid phase epitaxy (437/125) |
FOR 286 | DF | .~.~> Heteroepitaxy (437/126) {7} |