438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 268 | DF | .~.~ Growing single layer in multi-steps (437/108) {4} |
FOR 269 | .~.~.~ Polycrystalline layers (437/109) |