438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 262 | DF | .~.~ Source and substrate in close-space relationship (437/102) {2} |
FOR 263 | .~.~.~ Group IV elements (437/103) |