438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 257 | DF | .~.~ Forming buried regions with outdiffusion control (437/97) {1} |
FOR 258 | .~.~.~ Plural dopants simultaneously outdiffusioned (437/98) |