438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 221 | DF | .~ Including isolation step (437/61) {4} |
FOR 234 | DF | .~.~ Isolation by PN junction only (437/74) {4} |
FOR 236 | .~.~.~ By up-diffusion from substrate region and down diffusion into upper surface layer (437/76) {1} | |
FOR 237 | DF | .~.~.~.~> Substrate and epitaxial regions of same conductivity type, i.e., P or N (437/77) |