438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 150 | DF | .~ Using energy beam to introduce dopant or modify dopant distribution (437/ 16) {5} |
FOR 155 | DF | .~.~ Of semiconductor on insulating substrate (437/21) {14} |
FOR 156 | .~.~.~ Of semiconductor compound (437/22) {1} | |
FOR 157 | DF | .~.~.~.~> Light emitting diode (LED) (437/23) |