US PATENT SUBCLASS 438 / 942
MASKING

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

942MASKING {6}
943  DF  .~> Movable
944  DF  .~> Shadow
945  DF  .~> Special (e.g., metal, etc.)
946  DF  .~> Step and repeat
947  DF  .~> Subphotolithographic processing
948  DF  .~> Radiation resist {4}

DEFINITION

Classification: 438/942

MASKING:

Art collection involving the use of a structure having openings therein to affect selective processing of underlying regions laid bare by said openings.