US PATENT SUBCLASS 438 / 944
.~ Shadow
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
942
DF
MASKING
{6}
944
.~ Shadow
DEFINITION
Classification: 438/944
Shadow:
Art collection under 942 involving the use of a mask not in contact with the semiconductor substrate so as to cast a shadow thereupon.