US PATENT SUBCLASS 438 / 947
.~ Subphotolithographic processing

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

942  DF  MASKING {6}
947.~ Subphotolithographic processing

DEFINITION

Classification: 438/947

Subphotolithos:graphic processing:

Art collection under 942 wherein the photolithos:graphic features formed on the substrate are of a dimension below the resolution limit of the photolithos:graphic process.