| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 57 | DF | .~ Responsive to electromagnetic radiation {22} |
| 69 | DF | .~.~ Including integrally formed optical element (e.g., reflective layer, luminescent layer, etc.) {3} |
| 72 | ![]() | .~.~.~ Having reflective or antireflective component |