US PATENT SUBCLASS 438 / 702
.~.~.~ Plural coating steps

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694  DF  .~ Combined with coating step {5}
700  DF  .~.~ Formation of groove or trench {2}
702.~.~.~ Plural coating steps

DEFINITION

Classification: 438/702

Plural coating steps:

(under subclass 700) Processes wherein the viahole or trench is formed by a process having multiple material deposition steps.