US PATENT SUBCLASS 438 / 699
.~.~.~ Plural coating steps

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

689  DF  CHEMICAL ETCHING {6}
694  DF  .~ Combined with coating step {5}
697  DF  .~.~ Planarization by etching and coating {2}
699.~.~.~ Plural coating steps

DEFINITION

Classification: 438/699

Plural coating steps:

(under subclass 697) Processes having multiple material deposition steps are utilized in the planarization of the surface.