438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
57 | DF | .~ Responsive to electromagnetic radiation {22} |
64 | DF | .~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor {2} |
66 | DF | .~.~.~ Plural responsive devices (e.g., array, etc.) {1} |
67 | .~.~.~.~ Assembly of plural semiconductor substrates |