| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS | 
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} | 
| 57 | DF | .~ Responsive to electromagnetic radiation {22} | 
| 64 | DF | .~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor {2} | 
| 66 | DF | .~.~.~ Plural responsive devices (e.g., array, etc.) {1} | 
| 67 |  | .~.~.~.~ Assembly of plural semiconductor substrates |