| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
| 57 | DF | .~ Responsive to electromagnetic radiation {22} |
| 64 | ![]() | .~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor {2} |
| 65 | DF | .~.~.~> Having additional optical element (e.g., optical fiber, etc.) |
| 66 | DF | .~.~.~> Plural responsive devices (e.g., array, etc.) {1} |