438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
48 | DF | MAKING DEVICE OR CIRCUIT RESPONSIVE TO NONELECTRICAL SIGNAL {5} |
57 | DF | .~ Responsive to electromagnetic radiation {22} |
64 | .~.~ Packaging (e.g., with mounting, encapsulating, etc.) or treatment of packaged semiconductor {2} | |
65 | DF | .~.~.~> Having additional optical element (e.g., optical fiber, etc.) |
66 | DF | .~.~.~> Plural responsive devices (e.g., array, etc.) {1} |