US PATENT SUBCLASS 438 / 660
.~.~ Including heat treatment of conductive layer

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
660.~.~ Including heat treatment of conductive layer {2}
661  DF  .~.~.~> Subsequent fusing conductive layer {1}
663  DF  .~.~.~> Rapid thermal anneal {1}

DEFINITION

Classification: 438/660

Including heat treatment of conductive layer:

(under subclass 597) Processes wherein a thermal treatment is performed on the electrically conductive layer (e.g., for modifying the electrical properties thereof, etc.).

SEE OR SEARCH CLASS

148, Metal Treatment, appropriate subclasses for processes of altering the physical or electrical characteristics of metallic material.