438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
584 | DF | COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2} |
597 | DF | .~ To form ohmic contact to semiconductive material {24} |
660 | DF | .~.~ Including heat treatment of conductive layer {2} |
661 | .~.~.~ Subsequent fusing conductive layer {1} | |
662 | DF | .~.~.~.~> Utilizing laser |