US PATENT SUBCLASS 438 / 624
.~.~.~.~ Separating insulating layer is laminate or composite of plural insulating materials

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

584  DF  COATING WITH ELECTRICALLY OR THERMALLY CONDUCTIVE MATERIAL {2}
597  DF  .~ To form ohmic contact to semiconductive material {24}
618  DF  .~.~ Contacting multiple semiconductive regions (i.e., interconnects) {5}
622  DF  .~.~.~ Multiple metal levels, separated by insulating layer (i.e., multiple level metallization) {8}
624.~.~.~.~ Separating insulating layer is laminate or composite of plural insulating materials

DEFINITION

Classification: 438/624

Separating insulating layer is laminate or composite of plural insulating materials:

(under subclass 622) Processes wherein there is at least one separating insulator layer between different metal levels, which separating insulator layer is itself made up of plural sublayers or which separating layer is a composite such as a mixture of silicon oxide and silicon nitride.