438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
570 | DF | FORMING SCHOTTKY JUNCTION (I.E., SEMICONDUCTOR-CONDUCTOR RECTIFYING JUNCTION CONTACT) {4} |
572 | DF | .~ Compound semiconductor {2} |
576 | DF | .~.~ Into grooved or recessed semiconductor region {2} |
578 | .~.~.~ Forming electrode of specified shape (e.g., slanted, etc.) {1} | |
579 | DF | .~.~.~.~> T-shaped electrode |