438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
570 | DF | FORMING SCHOTTKY JUNCTION (I.E., SEMICONDUCTOR-CONDUCTOR RECTIFYING JUNCTION CONTACT) {4} |
572 | .~ Compound semiconductor {2} | |
573 | DF | .~.~> Multilayer electrode {2} |
576 | DF | .~.~> Into grooved or recessed semiconductor region {2} |