US PATENT SUBCLASS 438 / 573
.~.~ Multilayer electrode

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

570  DF  FORMING SCHOTTKY JUNCTION (I.E., SEMICONDUCTOR-CONDUCTOR RECTIFYING JUNCTION CONTACT) {4}
572  DF  .~ Compound semiconductor {2}
573.~.~ Multilayer electrode {2}
574  DF  .~.~.~> T-shaped electrode
575  DF  .~.~.~> Using platinum group metal (i.e., platinum (Pt), palladium (Pd), rodium (Rh), ruthenium (Ru), iridium (Ir), osmium (Os), or alloy thereof)

DEFINITION

Classification: 438/573

Multilayer electrode:

(under subclass 572) Processes wherein the contact is composed of plural layers.

SEE OR SEARCH THIS CLASS, SUBCLASS:

605, for a process for making plural layer ohmic electrode to a III-V compound semiconductor.