| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 570 | DF | FORMING SCHOTTKY JUNCTION (I.E., SEMICONDUCTOR-CONDUCTOR RECTIFYING JUNCTION CONTACT) {4} |
| 572 | DF | .~ Compound semiconductor {2} |
| 576 | DF | .~.~ Into grooved or recessed semiconductor region {2} |
| 577 | | .~.~.~ Utilizing lift-off |