US PATENT SUBCLASS 438 / 451
.~.~.~ Plural doping steps

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
439  DF  .~ Recessed oxide by localized oxidation (i.e., LOCOS) {9}
449  DF  .~.~ Dopant addition {2}
451.~.~.~ Plural doping steps

DEFINITION

Classification: 438/451

Plural doping steps:

(under subclass 449) Process utilizing multiple steps of doping semiconductive regions of the substrate.