US PATENT SUBCLASS 438 / 437
.~.~.~ Conformal insulator formation

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
424  DF  .~ Grooved and refilled with deposited dielectric material {7}
435  DF  .~.~ Multiple insulative layers in groove {2}
437.~.~.~ Conformal insulator formation

DEFINITION

Classification: 438/437

Conformal insulator formation:

(under subclass 435) Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material including forming an insulative layer which follows the contour of the groove.