US PATENT SUBCLASS 438 / 435
.~.~ Multiple insulative layers in groove

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
424  DF  .~ Grooved and refilled with deposited dielectric material {7}
435.~.~ Multiple insulative layers in groove {2}
436  DF  .~.~.~> Reflow of insulator
437  DF  .~.~.~> Conformal insulator formation

DEFINITION

Classification: 438/435

Multiple insulative layers in groove:

(under subclass 424) Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with plural insulative layers.