US PATENT SUBCLASS 438 / 428
.~.~.~ Reflow of insulator

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
424  DF  .~ Grooved and refilled with deposited dielectric material {7}
427  DF  .~.~ Refilling multiple grooves of different widths or depths {1}
428.~.~.~ Reflow of insulator

DEFINITION

Classification: 438/428

Reflow of insulator:

(under subclass 427) Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material including a step of redistributing insulative material by the viscous flow of the insulative material when exposed to high temperature.