US PATENT SUBCLASS 438 / 427
.~.~ Refilling multiple grooves of different widths or depths

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

400  DF  FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10}
424  DF  .~ Grooved and refilled with deposited dielectric material {7}
427.~.~ Refilling multiple grooves of different widths or depths {1}
428  DF  .~.~.~> Reflow of insulator

DEFINITION

Classification: 438/427

Refilling multiple grooves of different widths or depths:

(under subclass 424) Process for making electrically isolated laterally spaced semiconductor regions by grooving and refilling with insulative material wherein grooves of differing widths or depths are filled with insulative material.