US PATENT SUBCLASS 438 / 42
.~ Groove formation

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

22  DF  MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12}
42.~ Groove formation {2}
43  DF  .~.~> Tapered etching
44  DF  .~.~> With epitaxial deposition of semiconductor in groove

DEFINITION

Classification: 438/42

Groove formation:

(under subclass 22) Process having a step of removing material from the semiconductor substrate to form a recessed feature (e.g., trench, notch, etc.) relative to the surrounding regions of the substrate.