US PATENT SUBCLASS 438 / 44
.~.~ With epitaxial deposition of semiconductor in groove

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

22  DF  MAKING DEVICE OR CIRCUIT EMISSIVE OF NONELECTRICAL SIGNAL {12}
42  DF  .~ Groove formation {2}
44.~.~ With epitaxial deposition of semiconductor in groove

DEFINITION

Classification: 438/44

With epitaxial deposition of semiconductor in groove:

(under subclass 42) Process including a step of epitaxial growth of semiconductor material in the groove.