| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 400 | DF | FORMATION OF ELECTRICALLY ISOLATED LATERAL SEMICONDUCTIVE STRUCTURE {10} |
| 404 | DF | .~ Total dielectric isolation {7} |
| 411 | DF | .~.~ Air isolation (e.g., beam lead supported semiconductor islands, etc.) {1} |
| 412 | ![]() | .~.~.~ Semiconductor islands formed upon insulating substrate or layer (e.g., mesa isolation, etc.) |