| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| 381 | DF | MAKING PASSIVE DEVICE (E.G., RESISTOR, CAPACITOR, ETC.) {4} |
| 386 | | .~ Trench capacitor {3} |
| 387 | DF | .~.~> Having stacked capacitor structure (e.g., stacked trench, buried stacked capacitor, etc.) |
| 388 | DF | .~.~> With epitaxial layer formed over the trench |
| 389 | DF | .~.~> Including doping of trench surfaces {3} |