US PATENT SUBCLASS 438 / 388
.~.~ With epitaxial layer formed over the trench

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

381  DF  MAKING PASSIVE DEVICE (E.G., RESISTOR, CAPACITOR, ETC.) {4}
386  DF  .~ Trench capacitor {3}
388.~.~ With epitaxial layer formed over the trench

DEFINITION

Classification: 438/388

With epitaxial layer formed over the trench:

(under subclass 386) Process for making a trench capacitor including a step of forming an epitaxial semiconductive layer over the trench region.