438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
364 | .~ Self-aligned {2} | |
365 | DF | .~.~> Forming active region from adjacent doped polycrystalline or amorphous semiconductor {2} |
369 | DF | .~.~> Dopant implantation or diffusion {2} |