438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
353 | DF | .~ Including isolation structure {5} |
362 | DF | .~.~ Recessed oxide by localized oxidation (i.e., LOCOS) {1} |
363 | .~.~.~ With epitaxial semiconductor layer formation |