438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
353 | DF | .~ Including isolation structure {5} |
356 | DF | .~.~ Isolation by PN junction only {1} |
357 | .~.~.~ Including epitaxial semiconductor layer formation {1} | |
358 | DF | .~.~.~.~> Up diffusion of dopant from substrate into epitaxial layer |