438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
309 | DF | FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {25} |
312 | DF | .~ Having heterojunction {7} |
320 | DF | .~.~ Self-aligned {1} |
321 | .~.~.~ Utilizing dummy emitter |