438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
142 | DF | MAKING FIELD EFFECT DEVICE HAVING PAIR OF ACTIVE REGIONS SEPARATED BY GATE STRUCTURE BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {6} |
197 | DF | .~ Having insulated gate (e.g., IGFET, MISFET, MOSFET, etc.) {24} |
275 | DF | .~.~ Making plural insulated gate field effect transistors of differing electrical characteristics {1} |
276 | .~.~.~ Introducing a dopant into the channel region of selected transistors {2} | |
277 | DF | .~.~.~.~> Including forming overlapping gate electrodes |
278 | DF | .~.~.~.~> After formation of source or drain regions and gate electrode (e.g., late programming, encoding, etc.) |