438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
142 | DF | MAKING FIELD EFFECT DEVICE HAVING PAIR OF ACTIVE REGIONS SEPARATED BY GATE STRUCTURE BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS {6} |
149 | DF | .~ On insulating substrate or layer (e.g., TFT, etc.) {2} |
151 | DF | .~.~ Having insulated gate {11} |
162 | .~.~.~ Introduction of nondopant into semiconductor layer |