US PATENT SUBCLASS 216 / 86
.~.~ By electrical means or of an electrical property

Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

83  DF  NONGASEOUS PHASE ETCHING OF SUBSTRATE {9}
84  DF  .~ With measuring, testing, or inspecting {2}
86.~.~ By electrical means or of an electrical property

DEFINITION

Classification: 216/86

By electrical means or of an electrical property:

(under subclass 84) Process where the test is performed electrically or determines an electrical property, e.g., resistance, etc.