US PATENT SUBCLASS 216 / 85
.~.~ By optical means or of an optical property


Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

83  DF  NONGASEOUS PHASE ETCHING OF SUBSTRATE {9}
84  DF  .~ With measuring, testing, or inspecting {2}
85.~.~ By optical means or of an optical property


DEFINITION

Classification: 216/85

By optical means or of an optical property:

(under subclass 84) Process where the test is performed optically or determines an optical property, e.g., reflectance, etc.