US PATENT SUBCLASS 216 / 85
.~.~ By optical means or of an optical property
Current as of:
June, 1999
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216 /
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ETCHING A SUBSTRATE: PROCESSES
83
DF
NONGASEOUS PHASE ETCHING OF SUBSTRATE
{9}
84
DF
.~ With measuring, testing, or inspecting {2}
85
.~.~ By optical means or of an optical property
DEFINITION
Classification: 216/85
By optical means or of an optical property:
(under subclass 84) Process where the test is performed optically or determines an optical property, e.g., reflectance, etc.