US PATENT SUBCLASS 216 / 61
.~.~ By electrical means or of an electrical property

Current as of: June, 1999
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216 /   HD   ETCHING A SUBSTRATE: PROCESSES

58  DF  GAS PHASE ETCHING OF SUBSTRATE {6}
59  DF  .~ With measuring, testing, or inspecting {2}
61.~.~ By electrical means or of an electrical property

DEFINITION

Classification: 216/61

By electrical means or of an electrical property:

(under subclass 59) Process where the test is performed electrically or determines an electrical property, e.g. resistance, etc.