216 / | HD | ETCHING A SUBSTRATE: PROCESSES |
13 | DF | FORMING OR TREATING ELECTRICAL CONDUCTOR ARTICLE (E.G., CIRCUIT, ETC.) {6} |
17 | .~ Forming or treating of groove or through hole {2} | |
18 | DF | .~.~> Filling or coating of groove or through hole with a conductor to form an electrical interconnection |
19 | DF | .~.~> Filling or coating of groove or through hole in a conductor with an insulator |