204 / | HD | CHEMISTRY: ELECTRICAL AND WAVE ENERGY |
* | DD | PROCESSES AND PRODUCTS {7} |
192.1 | DF | .~ Coating, forming or etching by sputtering {3} |
192.32 | .~.~ Sputter etching {3} | |
192.33 | DF | .~.~.~> Measuring or testing (e.g., of operating parameters, end point determination, etc.) |
192.34 | DF | .~.~.~> Ion beam etching (e.g., ion milling, etc.) |
192.35 | DF | .~.~.~> Etching specified material {2} |