| 505 / | HD | SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS |
| 300 | DF | PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24} |
| 410 | ![]() | .~ With material removal by etching, laser ablation, or mechanical abrasion {3} |
| 411 | DF | .~.~> Utilizing plasma etching or sputter etching |
| 412 | DF | .~.~> Laser ablation |
| 413 | DF | .~.~> Utilizing mask (e.g., photoresist, etc.) |