505 / | HD | SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS |
300 | DF | PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24} |
410 | .~ With material removal by etching, laser ablation, or mechanical abrasion {3} | |
411 | DF | .~.~> Utilizing plasma etching or sputter etching |
412 | DF | .~.~> Laser ablation |
413 | DF | .~.~> Utilizing mask (e.g., photoresist, etc.) |