US PATENT SUBCLASS 505 / 410
.~ With material removal by etching, laser ablation, or mechanical abrasion


Current as of: June, 1999
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505 /   HD   SUPERCONDUCTOR TECHNOLOGY: APPARATUS, MATERIAL, PROCESS

300  DF  PROCESSES OF PRODUCING OR TREATING HIGH TEMPERATURE (Tc GREATER THAN 30 K) SUPERCONDUCTOR MATERIAL OR SUPERCONDUCTOR CONTAINING PRODUCTS OR PRECURSORS THEREOF {24}
410.~ With material removal by etching, laser ablation, or mechanical abrasion {3}
411  DF  .~.~> Utilizing plasma etching or sputter etching
412  DF  .~.~> Laser ablation
413  DF  .~.~> Utilizing mask (e.g., photoresist, etc.)


DEFINITION

Classification: 505/410

With material removal by etching, laser ablation, or mechanical abrasion:

(under subclass 300) Process wherein material is removed from a substrate (a) through chemical reaction, (b) by vaporization or decomposition due to the application of a laser, or (c) by mechanically wearing or grinding away a portion of preform to produce a pattern or shape.

(1) Note. Completely dissolving a metal portion of a metal-clad superconducting composite structure or completely dissolving a mask or resist is considered proper for this subclass and its indents.

(2) Note. Mechanically grinding to completely reduce a preform to particulate is excluded from this subclass.

SEE OR SEARCH THIS CLASS, SUBCLASS:

430, for process of making wire, tape, cable, coil, or fiber.

SEE OR SEARCH CLASS

204, Chemistry: Electrical and Wave Energy,

192.32+, for processes of sputter etching. 205, Electolysis: Processes, Compositions Used Therein and Methods of Preparing the Compositions,

640+, for electrolytic erosion of a workpiece for shape or surface change (e.g., etching, polishing, etc.).

216, Etching a Substrate: Processes,

3, for etching of high Tc (greater than 30oK) superconductive material.

264, Plastic and Nonmetallic Article Shaping or Treating: Processes, particularly

400, for processes of material removal for shaping that utilize laser ablation of a substrate.

451, Abrading,

28+, for a process of mechanical abrading.