438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 301 | DF | .~ Diffusing a dopant (437/141) {17} |
FOR 320 | DF | .~.~ From solid dopant source in contact with substrate (437/160) {4} |
FOR 323 | .~.~.~ Organic source (437/163) |