438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 294 | DF | .~ By fusing dopant with substrate, e.g., alloying, etc. (437/134) {6} |
FOR 298 | .~.~ Including plural controlled heating or cooling steps (437/138) |