| 438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
| FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
| FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
| FOR 249 | DF | .~.~ Growth through opening (437/89) {2} |
| FOR 252 | | .~.~.~ By liquid phase epitaxy (437/92) |