438 / | HD | SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS |
FOR 149 | DF | INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7} |
FOR 241 | DF | .~ Doping during fluid growth of semiconductor material on substrate (437/81) {25} |
FOR 249 | DF | .~.~ Growth through opening (437/89) {2} |
FOR 250 | .~.~.~ Forming recess in substrate and refilling (437/90) {1} | |
FOR 251 | DF | .~.~.~.~> By liquid phase epitaxy (437/91) |