US PATENT SUBCLASS 438 / FOR 152
.~.~ Ionized molecules (437/18)

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 149  DF  INCLUDING FORMING A SEMICONDUCTOR JUNCTION (437/15) {7}
FOR 150  DF  .~ Using energy beam to introduce dopant or modify dopant distribution (437/ 16) {5}
FOR 152.~.~ Ionized molecules (437/18)

DEFINITION

Classification: 438/FOR.152

Ionized molecules:

Foreign art collection for processes involving the use of a beam constituted of ionized molecules possessing sufficient kinetic energy to penetrate a semiconductor substrate.